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Vacuum plant for three-component multilayer coating deposition by magnetron sputtering

 Applications

The plant is used for depositing decorative, anticorrosive, reflective and other functional coatings on steel, plastic, glass and other industrial products. Metal coatings of chrome-nickel steel, aluminium, copper and titanium are deposited on the workpieces, which means that for steel products are low temperature processes conducted to 200 – 400 °С.

 Construction

Vacuum plant is of horizontal type and comprises:
✓ vacuum chamber;
✓ high-vacuum pump system;
✓ high voltage impulse power supply and a control unit for magnetron sputtering;
✓ high voltage impulse power supply and a control unit for cleaning the products in glow discharge;
✓ dosing gas system for Ar, N2, O2, CH4 ;
✓ water-cooling system.

 Technical characteristics

Working space dimensions, D x H , mm 300 х 120
Maximum working temperature, °С 350
Limited vacuum, hPa 7.10-6