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Vacuum plant for two-component multilayer coating deposition by magnetron sputtering

 Applications

The plant is used for depositing decorative, anticorrosive, reflective and other functional coatings on steel, plastic, glass and other industrial products. Thin metal coatings of targets of chrome-nickel steel, aluminium, copper and titanium are deposited on the workpieces by magnetron sputtering. Application of the facility is universal and quickly adjusts from one type of coating to another. Characterized by low material and energy costs.

 Construction

Vacuum plant for two-component multilayer coating deposition by magnetron sputtering is of horizontal type and comprises::
✓ vacuum chamber with original magnetron system mounted in it, that providing an opportunity for the simultaneous coating of articles in two workspaces;
✓ high-vacuum pump system;
✓ high voltage impulse power supply and a control unit for magnetron sputtering;
✓ high voltage impulse power supply and a control unit for cleaning the products in glow discharge;
✓ dosing gas system for Ar, N2, O2, CH4 ;
✓ water-cooling system.

 Technical characteristics

Workspace, pcs 2
Size of the workspace, mm 1200 х 1600
Maximum working temperature, °С 350
Limited vacuum, hPa 3.10-6